Method and system for optoelectronic receivers utilizing waveguide heterojunction phototransistors integrated in a cmos soi wafer

ABSTRACT

A method and system for optoelectronic receivers utilizing waveguide heterojunction phototransistors (HPTs) integrated in a CMOS SOI wafer are disclosed and may include receiving optical signals via a top surface of a photonically-enabled CMOS chip; and generating electrical signals in the chip utilizing one or more HPTs that detect optical signals. The HPTs may comprise a base and a split collector, with the split collector comprising a silicon-on-insulator (SOI) layer and a germanium layer. The thickness of the germanium layer may be such that carriers in the base do not interact with defects from an interface between the SOI layer and the germanium layer. The electrical signals may be amplified by amplifiers, the outputs of which may be utilized to bias the HPTs by a feedback network. An electrode formed longitudinally in the direction of light travel through the HPTs may bias the base of the HPTs.

CROSS-REFERENCE TO RELATED APPLICATIONS/INCORPORATION BY REFERENCE

This application makes reference to and claims priority to U.S.Provisional Application Ser. No. 61/274,580 filed on Aug. 19, 2009, U.S.Provisional Application Ser. No. 61/274,588 filed on Aug. 19, 2009, andU.S. Provisional Application Ser. No. 61/274,605 filed on Aug. 19, 2009,which are all hereby incorporated herein by reference in their entirety.

FEDERALLY SPONSORED RESEARCH OR DEVELOPMENT

[Not Applicable]

MICROFICHE/COPYRIGHT REFERENCE

[Not Applicable]

FIELD OF THE INVENTION

Certain embodiments of the invention relate to signal processing. Morespecifically, certain embodiments of the invention relate to a methodand system for optoelectronic receivers utilizing waveguideheterojunction phototransistors integrated in a CMOS SOI wafer.

BACKGROUND OF THE INVENTION

As data networks scale to meet ever-increasing bandwidth requirements,the shortcomings of copper data channels are becoming apparent. Signalattenuation and crosstalk due to radiated electromagnetic energy are themain impediments encountered by designers of such systems. They can bemitigated to some extent with equalization, coding, and shielding, butthese techniques require considerable power, complexity, and cable bulkpenalties while offering only modest improvements in reach and verylimited scalability. Free of such channel limitations, opticalcommunication has been recognized as the successor to copper links.

Optical communication systems have been widely adopted for applicationsranging from internet backbone, local area networks, data centers,supercomputing, to high-definition video. Due to superior bandwidth andlow loss, optical fibers are the medium of choice for transportinghigh-speed binary data. However, virtually all data processing is stillperformed in the electrical domain. This necessitates anelectrical-to-optical conversion (EO) in transmitters andoptical-to-electrical (OE) conversion in receivers. Robust EO conversionis simpler, since electrical signals in the transmitter can berelatively large and well-controlled to match characteristics of lasersor optical modulators. On the other hand, OE recovery is complicated bynumerous optical loss mechanisms present in practical links as well aspenalties incurred due to transmitter non-idealities such as finiteextinction ratio (ER).

Further limitations and disadvantages of conventional and traditionalapproaches will become apparent to one of skill in the art, throughcomparison of such systems with the present invention as set forth inthe remainder of the present application with reference to the drawings.

BRIEF SUMMARY OF THE INVENTION

A system and/or method for optoelectronic receivers utilizing waveguideheterojunction phototransistors integrated in a CMOS SOI wafer,substantially as shown in and/or described in connection with at leastone of the figures, as set forth more completely in the claims.

Various advantages, aspects and novel features of the present invention,as well as details of an illustrated embodiment thereof, will be morefully understood from the following description and drawings.

BRIEF DESCRIPTION OF SEVERAL VIEWS OF THE DRAWINGS

FIG. 1A is a block diagram of a photonically enabled CMOS chipcomprising germanium heterojunction phototransistors, in accordance withan embodiment of the invention.

FIG. 1B is a diagram illustrating an exemplary CMOS chip, in accordancewith an embodiment of the invention.

FIG. 1C is a diagram illustrating an exemplary CMOS chip coupled to anoptical fiber cable, in accordance with an embodiment of the invention.

FIG. 2 is a block diagram of an optical receiver comprisingheterojunction phototransistors, in accordance with an embodiment of theinvention.

FIG. 3 is a block diagram of an optical receiver comprising a singleheterojunction phototransistor, in accordance with an embodiment of theinvention.

FIG. 4 is a cross-sectional view of a phototransistor integrated in asilicon-on-insulator substrate, in accordance with an embodiment of theinvention.

FIG. 5 is a block diagram of exemplary heterojunction phototransistorCMOS and pre-salicidation processes, in accordance with an embodiment ofthe invention.

DETAILED DESCRIPTION OF THE INVENTION

Certain aspects of the invention may be found in a method and system foroptoelectronic receivers utilizing waveguide heterojunctionphototransistors integrated in a CMOS SOI wafer. Exemplary aspects ofthe invention may comprise receiving one or more optical signals viaoptical fibers coupled to a top surface of the photonically-enabled CMOSchip. One or more electrical signals may be generated utilizing one ormore germanium waveguide heterojunction phototransistors that detect theone or more optical signals received via one or more grating couplers.The electrical signals may be amplified via one or more voltageamplifiers, or one or more transimpedance amplifiers, the outputs ofwhich may be utilized to bias the one or more germanium waveguideheterojunction phototransistors by a feedback network. The one or morereceived optical signals may be coupled into opposite ends of the one ormore waveguide heterojunction phototransistors. A collector region ofthe one or more germanium waveguide heterojunction phototransistors maycomprise a silicon layer and a germanium layer, and a base region of theone or more germanium waveguide heterojunction phototransistors maycomprise a silicon germanium alloy with germanium composition rangingfrom 70% to 100%, for example. The germanium waveguide heterojunctionphototransistors may be biased via an electrical signal applied to abase terminal or via an optical signal. The received one or more opticalsignals may be demodulated by communicating a mixer signal to a baseterminal of the one or more germanium waveguide heterojunctionphototransistors.

FIG. 1A is a block diagram of a photonically enabled CMOS chipcomprising germanium heterojunction phototransistors, in accordance withan embodiment of the invention. Referring to FIG. 1A, there is shownoptoelectronic devices on a CMOS chip 130 comprising optical modulators105A-105D, high-speed heterojunction phototransistors 111A-111D, monitorphotodiodes 113A-113H, and optical devices comprising taps 103A-103K,optical terminations 115A-115D, and grating couplers 117A-117H. Thereare also shown electrical devices and circuits comprising amplifiers107A-107D, analog and digital control circuits 109, and control sections112A-112D. The amplifiers 107A-107D may comprise transimpedance andlimiting amplifiers (TIA/LAs), for example. Optical signals arecommunicated between optical and optoelectronic devices via opticalwaveguides fabricated in the CMOS chip 130.

The optical modulators 105A-105D comprise Mach-Zehnder or ringmodulators, for example, and enable the modulation of the CW laser inputsignal. The optical modulators 105A-105D comprise high-speed andlow-speed phase modulation sections and are controlled by the controlsections 112A-112D. The high-speed phase modulation section of theoptical modulators 105A-105D may modulate a CW light source signal witha data signal. The low-speed phase modulation section of the opticalmodulators 105A-105D may compensate for slowly varying phase factorssuch as those induced by mismatch between the waveguides, waveguidetemperature, or waveguide stress and is referred to as the passivephase, or the passive biasing of the MZI.

This mismatch between the waveguides may be intentional, such as in animbalanced MZI, but is often unintentional in a nominally balanced MZIdue to small imperfections in waveguide fabrication. The phasemodulators then have a dual role: to compensate for the passive biasingof the MZI and to apply the additional phase modulation used to modulatethe light intensity at the output port of the MZI according to a datastream. The former phase tuning and the latter phase modulation may beapplied by separate, specialized devices, since the former is a lowspeed, slowly varying contribution, while the latter is typically a highspeed signal. These devices are then respectively referred to as theLSPM and the HSPM. Examples for LSPM are thermal phase modulators (TPM),where a waveguide portion is locally heated up to modify the index ofrefraction of its constituting materials, or forward biased PINjunctions (PINPM) where current injection into the PIN junction modifiesthe carrier density, and thus the index of refraction of thesemiconductor material. An example of an HSPM is a reversed biased PINjunction, where the index of refraction is also modulated via thecarrier density, but which allows much faster operation, albeit at alower phase modulation efficiency per waveguide length.

The outputs of the modulators may be optically coupled via waveguides tothe grating couplers 117E-117H. The taps 103D-103K comprise four-portoptical couplers, for example, and are utilized to sample the opticalsignals generated by the optical modulators 105A-105D, with the sampledsignals being measured by the monitor photodiodes 113A-113H. The unusedbranches of the taps 103D-103K are terminated by optical terminations115A-115D to avoid back reflections of unwanted signals.

The grating couplers 117A-117H comprise optical gratings that enablecoupling of light into and out of the CMOS chip 130. The gratingcouplers 117A-117D are utilized to couple light received from opticalfibers into the CMOS chip 130, and the grating couplers 117E-117H areutilized to couple light from the CMOS chip 130 into optical fibers. Thegrating couplers 117A-117H may comprise single polarization gratingcouplers (SPGC) and/or polarization splitting grating couplers (PSGC).In instances where a PSGC is utilized, two input, or output, waveguidesmay be utilized.

The optical fibers may be epoxied, for example, to the CMOS chip, andmay be aligned at an angle from normal to the surface of the CMOS chip130 to optimize coupling efficiency. In an embodiment of the invention,the optical fibers may comprise single-mode fiber (SMF) and/orpolarization-maintaining fiber (PMF). By integrating CMOS chips at eachend of the optical fibers, a bidirectional link is enabled that may onlyrequire a single laser. In another embodiment of the invention, a singlelaser and a single fiber may be utilized to configure a bidirectionallink. This may be enabled by using a PSGC, where two optical signals maybe launched into the same fiber, for example.

In another exemplary embodiment, optical signals may be communicateddirectly into the surface of the CMOS chip 130 without optical fibers bydirecting a light source on an optical coupling device in the chip, suchas the light source interface 135 and/or the optical fiber interface139. This may be accomplished with directed laser sources and/or opticalsources on another chip flip-chip bonded to the CMOS chip 130.

The high-speed heterojunction phototransistors 111A-111D may convertoptical signals received from the grating couplers 117A-117D intoelectrical signals that are communicated to the amplifiers 107A-107D forprocessing. The high-speed heterojunction phototransistors 111A-111D maycomprise germanium (Ge) in the collector and base regions for absorptionin the 1.55 μm optical wavelength range, and may be integrated on a CMOSsilicon-on-insulator (SOI) wafer.

High-speed, low noise photodetectors are key components in modernoptical communications. Among the three main classes of semiconductorphotodetectors, namely photodiodes, avalanche photodiodes (APDs), andphototransistors, the latter demonstrating higher intrinsic gain at biasvoltages that are much lower than those used for APDs and with muchlower noise.

HPT speed and gain performance may be improved by replacing thebase-emitter junction with an appropriate gradual heterojunction.Phototransistor spectral response may be extended to the third window offiber-optic communication at 1.55 μm by replacing SiGe in the transistorbase with pure Ge, thereby dramatically increasing the efficiency ataround 1.55 μm due to the much higher absorption coefficient of Ge atthat wavelength. Moreover, the larger valence band discontinuity mayfurther increase the emitter efficiency, thus resulting in even highergain. A thicker Ge base layer may be utilized to distance the activeabsorbing region of the HPT from the misfit dislocations caused by thelarge lattice mismatch (˜4%) existing between the two semiconductors.

In an exemplary embodiment of the invention, heterojunctionphototransistors (HPTs) may comprise pure Ge not only in the base, butalso part of the collector, thus allowing high absorption efficiencyclose to 1.55 μm and a sufficient spacing of the sensitive base layerfrom the defects at the Si/Ge heterointerface. Moreover, the devicecomprises a waveguide optical configuration in which the light may becoupled and absorbed perpendicular to the current flow direction, thusallowing for independent optimization of efficiency and transit time.The small overall thickness of the device, its geometry and the type ofprocesses used for its fabrication allow its integration alongside otheroptical and electrical components in a CMOS SOI wafer.

The analog and digital control circuits 109 may control gain levels orother parameters in the operation of the amplifiers 107A-107D, whichthen communicate electrical signals off the CMOS chip 130. The controlsections 112A-112D comprise electronic circuitry that enable modulationof the CW laser signal received from the splitters 103A-103C. Theoptical modulators 105A-105D require high-speed electrical signals tomodulate the refractive index in respective branches of a Mach-Zehnderinterferometer (MZI), for example. In an embodiment of the invention,the control sections 112A-112D may include sink and/or source driverelectronics that may enable a bidirectional link utilizing a singlelaser.

In operation, the CMOS chip 130 may be operable to transmit and/orreceive and process optical signals. The grating couplers 117A-117D maybe operable to receive optical signals from optical fibers coupled tothe chip 130 and may convert the optical mode of the fiber into the muchsmaller mode of a Si waveguide fabricated on the CMOS SOI wafer. Thegrating couplers 117A-117D may comprise a single-polarization or apolarization-splitting type: in the first case, only a specificpolarization is coupled to a single Si waveguide, while in the secondcase, two orthogonal polarizations are split into two output waveguides.The opto-electronic converter is realized, in this application, using anintegrated waveguide Si/Ge heterojunction phototransistor (HPT). Thehigh-speed heterojunction phototransistors 111A-111D comprise npn typedevices and may have two equivalent optical inputs and two, oroptionally three, electrical terminals including the emitter and thecollector, with the optional third base terminal, which may be used forbiasing and signal mixing. Depending on the type of grating couplerused, one end or both inputs of the HPT waveguide may receive theoptical signal coming from the grating coupler output(s). In a typicalbiasing scheme, the collector may be biased at a higher voltage than theemitter. The base electrode, if present, may be biased at anintermediate voltage between collector and emitter.

In an exemplary embodiment of the invention, the HPT of the high-speedheterojunction phototransistors 111A-111D realizing thecurrent-to-voltage conversion may be DC connected to one of the inputsof a trans-impedance amplifier (TIA), while another identical HPT, notilluminated, may be connected to the other input of the TIA to create abalanced architecture. In this scheme, the bias for the HPTs may bederived from the TIA outputs through feedback impedances. In analternative to this embodiment, when a signal and its complementary areimpressed on two orthogonal polarizations of the optical carrier and aresplit into two waveguides by a splitting grating coupler, the two HPTsmay receive these two signals, thus realizing a fully symmetricalreceiver.

In another exemplary embodiment of the invention, a single HPT may bebiased from a voltage supply through one or more impedances connectingthe collector to the positive supply and the emitter to ground. In thiscase, the photocurrent to voltage conversion may be realized through theimpedances and the TIA may be replaced by a low noise voltage amplifier.Connection of the collector and emitter to the inputs of the voltageamplifier may be realized through high pass filters to decouple the HPTbias from the amplifier bias. The biasing impedances may compriseinductors to introduce peaking and improve the high frequency response.

FIG. 1B is a diagram illustrating an exemplary CMOS chip, in accordancewith an embodiment of the invention. Referring to FIG. 1B, there isshown the CMOS chip 130 comprising electronic devices/circuits 131,optical and optoelectronic devices 133, a light source interface 135,CMOS chip front surface 137, an optical fiber interface 139, and CMOSguard ring 141.

The light source interface 135 and the optical fiber interface 139comprise grating couplers, for example, that enable coupling of lightsignals via the CMOS chip surface 137, as opposed to the edges of thechip as with conventional edge-emitting devices. Coupling light signalsvia the CMOS chip surface 137 enables the use of the CMOS guard ring 141which protects the chip mechanically and prevents the entry ofcontaminants via the chip edge.

The electronic devices/circuits 131 comprise circuitry such as theamplifiers 107A-107D and the analog and digital control circuits 109described with respect to FIG. 1A, for example. The optical andoptoelectronic devices 133 comprise devices such as the taps 103A-103K,optical terminations 115A-115D, grating couplers 117A-117H, opticalmodulators 105A-105D, high-speed heterojunction phototransistors111A-111D, and monitor photodiodes 113A-113H.

In an embodiment of the invention, the high-speed heterojunctionphototransistors 111A-111D may be integrated in a SOI CMOS substrate andmay comprise germanium in the base and collector regions, enabling thedetection of 1.55 μm optical signals. The Ge processing steps may beinserted between standard CMOS processing steps, and the Ge layerdeposited on Si may be thick enough to separate the base-collectordepletion region from dislocations at the Ge—Si interface.

FIG. 1C is a diagram illustrating an exemplary CMOS chip coupled to anoptical fiber cable, in accordance with an embodiment of the invention.Referring to FIG. 1C, there is shown the CMOS chip 130 comprising theCMOS chip surface 137, and the CMOS guard ring 141. There is also showna fiber-to-chip coupler 143, an optical fiber cable 145, and an opticalsource assembly 147.

The CMOS chip 130 comprising the electronic devices/circuits 131, theoptical and optoelectronic devices 133, the light source interface 135,the CMOS chip surface 137, and the CMOS guard ring 141 may be asdescribed with respect to FIG. 1B.

In an embodiment of the invention, the optical fiber cable may beaffixed, via epoxy for example, to the CMOS chip surface 137. The fiberchip coupler 143 enables the physical coupling of the optical fibercable 145 to the CMOS chip 130.

FIG. 2 is a block diagram of an optical receiver comprisingheterojunction phototransistors, in accordance with an embodiment of theinvention. Referring to FIG. 2, there is shown a receiver 200 comprisingHPTs 201A and 201B, TIA 203, and feedback impedances 205A and 205B.There is also shown an input optical signal and a receiver outputsignal.

The HPTs 201A and 201B comprise npn heterojunction phototransistors, forexample, and may be fabricated with Ge collector and base regions on aSOI CMOS substrate. In this manner, high-speed operation may be enabledwith detection out to the 1.55 μm optical wavelength range. The HPTs201A and 201B may comprise two equivalent optical inputs and two, oroptionally three, electrical terminals including the emitter and thecollector, with the optional third base terminal, which may be used forbiasing and signal mixing. In a typical biasing scheme, the collectormay be biased at a higher voltage than the emitter. The base electrode,if present, may be biased at an intermediate voltage between collectorand emitter.

The TIA 203 may comprise a current-to-voltage amplifier that may beoperable to amplify a input currents and generate output voltages. TheTIA 203 may comprise feedback impedances 205A and 205B, which maycomprise resistors, or a combination or resistors, capacitors, andinductors for frequency response compensation.

In operation, the HPT 201A realizing the current-to-voltage conversionof the received optical signal may be DC-coupled to one of the inputs ofthe TIA 201, while HPT 201B, not illuminated, is connected to the otherinput to create a balanced architecture. In this manner, the bias to theHPTs 201A and 201B may be derived from the TIA 203 outputs throughfeedback impedances 205A and 205B. The receiver 200 may generate anoutput signal, Out, that may comprise a voltage signal proportional tothe received optical signal.

In an embodiment of the invention, the base terminal of the HPTs 201Aand 201B, if existing, may be biased using a second voltage source,possibly through a resistor or a passive compensation network ofinductors, capacitors, resistors, for example, which may be used toequalize the frequency response of the HPTs 201A and 201B. HPT bias mayalso occur optically through the non-ideal extinction ratio of theincoming signal or by an additional optical biasing signal injected inthe device. The base terminal may also be used to implement an AGCfunction where the current injected may be determined based on theaveraged signal amplitude at the output of the amplifier.

FIG. 3 is a block diagram of an optical receiver comprising a singleheterojunction phototransistor, in accordance with an embodiment of theinvention. Referring to FIG. 3, there is shown a receiver 300 comprisingan HPT 301, bias impedances 303A and 303B, high-pass filters (HPFs) 305Aand 305B, and a voltage amplifier 307. There is also shown an inputoptical signal, a supply voltage, V_(Supply), and an output signal,V_(Out).

The HPT 301 may be substantially similar to the HPTs 201A and 201Bdescribed with respect to FIG. 2, but coupled to a voltage amplifier viathe HPFs 305 and 305B to decouple the HPT bias from that of the voltageamplifier 307. The HPFs 305A and 305B may comprise resistor, capacitor,and/or inductor networks, for example, that may be operable to blocklow-frequency signals, while allowing high-frequency signal to passthrough to the voltage amplifier 307.

In operation, the HPT 301 may be biased from the voltage supply,V_(Supply), through the bias impedances Z_(B1) and Z_(B2) 303A and 303B,connecting the collector to the positive supply and the emitter toground. The biasing impedances Z_(B1) and Z_(B2) 303A and 303B maycomprise resistors and inductors to introduce peaking and improve thehigh frequency response. In this case, the photocurrent to voltageconversion may be realized through the impedances Z_(B1) and Z_(B2) andthe voltage amplifier then amplifies the voltage generated by the HPT301 from the received optical signal, thereby generating an outputsignal, V_(Out), proportional to the received optical signal.

In an embodiment of the invention, the base terminal of the HPT 301, ifexisting, may be biased using a second voltage source 309, possiblythrough a resistor or a passive compensation network of inductors,capacitors, resistors, for example, which may be used to equalize thefrequency response of the HPT 301. HPT bias may also occur opticallythrough the non-ideal extinction ratio of the incoming signal or by anadditional optical biasing signal injected in the device. The baseterminal may also be used to implement an AGC function where the currentinjected may be determined based on the averaged signal amplitude at theoutput of the amplifier.

In addition to biasing the HPT 301, the optional base terminal may beutilized to mix the received optical signal with a local optical signal309. In this manner, analog signals carried by an optical carrier may bedemodulated or shifted in frequency utilizing a local electricaloscillator.

In another exemplary embodiment of the invention, a DC floating baseterminal may also be used to detect the presence and amplitude of theoptical signal impinging on the HPT 301 to realize a loss of signal(LOS) detector, where a DC voltage present between the base and theemitter is dependent logarithmically on the base current flowing in thedevice. The base current may comprise a thermal and an opticalcomponent, the latter being induced by the absorbed light.

FIG. 4 is a cross-sectional view of a phototransistor integrated in asilicon-on-insulator substrate, in accordance with an embodiment of theinvention. Referring to FIG. 4, there is shown an HPT 400 comprising asplit collector 419, a Ge base 417, and an emitter 415. There is alsoshown collector electrodes 401A and 401B, salicided collector contacts4034A and 403B, collector contact tubs 405A and 405B, shallow trenches407A and 407B, a buried oxide 409, a base electrode 411, an emitterelectrode 413, a Si sub-collector 419A, a Ge collector 419B, and asilicon SOI layer 421.

The HPT 400 comprises a Si sub-collector layer realized by implantingn-type impurities in the device layer of an SOI wafer, the Si SOI layer421. The split collector 419 may comprise the Ge collector 419B and theSi sub collector 419A configured in the Si SOI layer 421. A thicker Gecollector layer 419B may be utilized to distance the base-collectorjunction from the Ge/Si interface where misfit dislocations aregenerated due to the ˜4% lattice mismatch between Ge and Si.

Depending on the nature of the Ge/Si interface, the base-collectordepletion layer may or may not be configured to extend into the Si. Forsub-optimal interfaces, the collector may be formed entirely in the Gelayer in order to minimize the effect of interfacial defects on currenttransport across the base-collector junction. If very low interfacedefect density is achieved, then the profile of the n-doping in the Sican be gradually increased from the surface to the buried oxide suchthat part of the depletion region resides in the Si layer, for operatingvoltage versus transit time optimization. The peak concentration ofn-type doping in this case may be on the order of 10¹⁹-10²⁰ cm⁻³. Thethickness of the Si sub collector 419A may vary from ˜50 to ˜600 nm, forexample. The Si sub collector 419A may then be overgrown with anepitaxial pure Ge film whose first part (collector) is n-type doped toform the collector and the remaining thickness is p-doped to form thebase. The collector portion of the Ge epilayer may be grown to athickness of ˜50 to ˜200 nm and n-doped to a concentration of ˜10¹⁸ cm⁻³and base region may be grown to a thickness of ˜20 to ˜100 nm andp-doped with a concentration of ˜10¹⁹ cm⁻³. The composition of the baseregion may be gradually changed from pure Ge to ˜80% SiGe in order tocreate a quasi-electric field reducing carrier transit time in the base.Both the Ge film and the Si underneath may be laterally lithographicallydefined in order to allow confined propagation of one or more opticalmodes at a wavelength close to 1.5 μm in the direction perpendicular tothe figure. The thickness of the Ge-collector 419B may be configuredsuch that the defects at the Si/Ge interface do not interact withcarriers diffusing in the base layer.

The HPT 400 may be completed by deposition of an n-type dopedpolycrystalline or crystalline Si or SiGe film to define the emitter415. The polysilicon (or poly-SiGe) film is in contact with the Ge filmthrough openings in a passivation dielectric film. The contact area maybe configured based on a tradeoff between junction area and baseresistance. In addition, the position of the contact region may bechosen to minimize or maximize the proximity to the lobes of an opticalmode traveling in the waveguide, thus optimizing for efficiency byreducing absorption/scattering in the poly film, or speed by reducingthe transit time of photogenerated carriers.

In another exemplary embodiment, the base electrode 411 may beconfigured on the Ge base 417 in order to electrically bias the HPT 400.The base electrode may be positioned longitudinally (i.e. in thedirection of light propagation, perpendicular to the figure) followingsimilar considerations as those reported above for the emitter layer.

The collector electrodes 401A and 401B may be configured to the side ofthe structure, outside the shallow trenches 407A and 407B used to helpconfine the optical modes, by contacting the top layer of the n-typedoped Si, the salicided collector contacts 403A and 403B. Thesalicidation process may be utilized to reduce parasitic collectorresistance.

In operation, the HPT 400 may be biased via the emitter, base, andcollector contacts comprising the emitter electrode 413, the baseelectrode 411, and the collector electrodes 401A and 401B, respectively.Optical signals may be coupled to the ends of the HPT 400, i.e. into andout of the plane of FIG. 4, with the light absorbed by the Ge layersgenerating electron-hole pairs that may be swept out to the appropriateterminals by the electric field in the depletion regions. In thismanner, an electrical current may be generated from collector to emitterthat is proportional to the absorbed light signal.

FIG. 5 is a block diagram of exemplary heterojunction phototransistorCMOS and pre-salicidation processes, in accordance with an embodiment ofthe invention. Referring to FIG. 5, there is shown exemplary embodimentsof CMOS and salicidation processes, with the left example 500 comprisinga pre-salicidation process and the right example 510 comprising apost-salicidation process.

In the CMOS/salicidation process flows 500 and 510 shown in FIG. 5, theCMOS steps comprise: shallow trench isolation (STI) 501, deepimplant/well formation 503, a gate module 507, extension implants 509,spacer etch 511, source/drain (S/D) implants and activation 513,salicidation 515, contact 517, and back-end 519, where back-end 519comprises all metal/via formation and final passivation. Thepre-salicidation process of process 500 comprises subcollector implants505, temporary transistor protect (TPROT) deposition 514A, Ge windowetch 514B, pre-epi cleans 514C, epi: collector 514D, Epi: base, gateprotect deposition 514F, emitter opening 514G, emitter deposition 514H,emitter lithography 5141, gate protect and temporary protect litho 514J.The post-salicidation process 510 comprises a Ge window stack deposition515A, Ge window etch 515B, pre-epi cleans 515C, epi: collector 515D,epi: base 515E, gate protect deposition 515F, emitter opening 515G,emitter deposition 515H, emitter lithography 515I, gate protectlithography 515J, and emitter salicidation 515H.

The subcollector implants 505 to form the Si part of the collectorregion of a HPT, such as the Si SOI layer shown in FIG. 4, may beperformed together with the well implants 503 just after the STI module501. In the epi steps, epi: collector 514D, epi: base 514E, epi:collector 515D, and epi: base 515E, pure Ge films cannot withstandtemperatures higher than ˜900 C. Moreover, interdiffusion with Si andthe fast diffusion of n-type dopants may occur at a significantly lowertemperature. Thus, the integration of the Ge epi steps 514D, 514E, 515D,and 515E after the S/D implants and activation 513 may be desirablebecause of the high temperatures used in that process, which may includea spike anneal at ˜1000 C.

The Ge epi processes may be incorporated just before the salicidation515 step, as shown in process 500, to avoid exposing the salicide films,such as NiSi, for example, from the thermal processes involved in thesubstrate cleaning process, pre-epi cleans 514C and 515C, preceding Geepitaxy 514D, 514E, 515D, and 515E. At this time in the process,transistor polygates and S/D regions in active Si are exposed, andtherefore in the first step, a temporary transistor protective layer(TPROT) 514A may be deposited to avoid Ge epitaxy occurring on theexposed transistor Si and poly. This may comprise a thin oxide layer(˜50-100 nm) that may be later removed without harming the spacernitride. If needed, a second dielectric layer of different composition(nitride/oxynitride) may be deposited on top of the oxide in order tocreate the right sidewall heights in the windows open for selectiveepitaxy in the next step. Finally, the dielectric stack may beterminated with an oxide layer to improve epi selectivity. Windows maythen be opened in the dielectric stack to expose the Si active layer inplaces where the Ge film will be deposited. Etching can proceedpartially in the Si in order to create a recess that helps opticalcoupling and electrical field distribution and also minimizes thetopography on the wafer after the epitaxy.

Ge epi may be preceded by wet and in-situ cleaning steps. The wetprocesses may comprise HF, ozone-based and RCA-style processes, whilethe in-situ processes in the epi tool, may comprise hydrogen, HCl, orGermane flows, at a substrate temperature between ˜350 C and ˜800 C.These processes remove residual contaminants, such as O and C, from theSi surface and prepare the wafer for Ge epitaxy. The cleaning steps 514Cmay be iterated one or more times in order to improve surface quality.

The epitaxy steps 514D, 514E, 515D, and 515E may comprise a fullyselective process using a mixture of GeH₄ and HCl or by a two stepprocess in which a blanket film deposition may be followed by a polyphase selective etch, utilizing HCl, for example. The deposition/etchcycle may be repeated several times to improve film quality andselectivity. Also the collector part of the device may be grown usingthe growth and etch back method, while the base may use a fullyselective process to improve thickness control. A carrier gas such ashydrogen or nitrogen may be used during the process to help establish anappropriate chamber pressure. The epi process occurs at a substratetemperature in the range ˜350 C to ˜450 C. The graded composition regionof the epi film, the base, where the composition may be changed from100% Ge to ˜80% Ge, may be grown by incorporating SiH₄ or SiH₂Cl₂ to thegas mixture and increasing the substrate temperature to ˜500 C. Optionalco-doping with carbon in the base film may be accomplished by adding CH₄or a similar carbon source to the gas mixture.

Doping may be introduced in the epitaxial film by using PH₃ or AsH₃ oran alternative source of P or As species for the n-type collector andB₂H₃ or other sources of B atoms for p-type doping in the gas mixture.Desired doping concentration profiles may be obtained by regulating theflow of the different species during the growth. Optionally, adelta-doped base may be obtained by temporarily interrupting the flow ofthe Si and Ge precursors, thus generating a single sub-layer of dopingatoms embedded in the epi material. Epitaxy may be completed with thedeposition of a pure Si film of a few nm thickness to protect theSiGe/Ge film from oxidation. Doping activation by RTA may occur in theepi tool or later on in the process.

The epi steps 514D, 514E, 515D, and 515E may be followed by the blanketdeposition of a protective layer, GPROT 514F, which may comprise anoxide, nitride, oxinitride, or a multilayer of these materials, andwhose thickness and composition may be chosen to help in the formationof the optional contact base later on in the process, while minimizingthe emitter/base overlap capacitance. The emitter may be processed inthe emitter opening step 514G by opening windows in this protectivelayer corresponding to the desired placement of the subsequent epitaxiallayer deposition. Reactive ion etching (RIE) may be used for this windowprocess.

A wet and or in-situ cleaning step may follow the emitter window openingprocess 514G as part of the emitter deposition 514H. A blanketpolysilicon or SiGe highly n-doped layer using P, As, or Sb, for examplemay then be deposited to a thickness of ˜100-400 nm. The poly Si/SiGemay then lithographically defined to form the emitter electrodes and maybe removed from everywhere else on the wafer. The gate protection(GPROT) layer may then be patterned outside of the regions where the epifilm is deposited with some margin to ensure sealing of the epi film andthe original transistor protective layer (TPROT) is finally removed byeither dry or wet etch, GPROT and TPROT lithography 514J.

The process then proceeds back to the main stream of the CMOS processtechnology with surface cleaning prior to Ni (or Co) deposition andreaction to form the salicide in the salicidation step 515. Since theemitter polySi/SiGe is exposed at this time, it will be salicided aswell, thus reducing its sheet resistance which is beneficial fortransistor performance (speed). At a later time, when contacts areformed, in addition to the standard polygate and active electrodes,contacts to the collector (same as active), base (on top of the Ge/SiGeepi) and emitter (poly above the Ge/SiGe epi) will be formed.

A variant of this process may be shown in the CMOS/salicide process 510which may be utilized when the thermal budget required for pre-epiclean, epi and emitter poly deposition is deemed affordable for theselected salicide. In this case, the epi steps 515C-515E may be movedafter the salicidation step 515 and the deposition of the transistorprotective oxide (TPROT) and its removal later on in the process is notneeded. This variation of the process does not allow the salicidation ofthe emitter poly together with the other electrodes, however, andtherefore a second dedicated salicidation step 515H may be run after theemitter formation, if required. In this case, the use of poly SiGeinstead of Si for the emitter may help lower the salicide formationtemperature, thus reducing interactions with the existing gate and S/Dsalicide.

In an embodiment of the invention, a method and system are disclosed foroptoelectronic receivers 200/300 utilizing waveguide heterojunctionphototransistors 111A-111D, 201A, 201B, 301, 400 integrated in a CMOSSOI wafer 410. Aspects of the invention may comprise receiving one ormore optical signals via optical fibers 145 coupled to a top surface ofthe photonically-enabled CMOS chip 130. One or more electrical signalsmay be generated utilizing one or more germanium waveguideheterojunction phototransistors 111A-111D, 201A, 201B, 301, 400 that maydetect the one or more optical signals from one or more grating couplers117A-117D, 139. The electrical signals may be amplified via one or morevoltage amplifiers 307, or one or more transimpedance amplifiers 203,the outputs of which may be utilized to bias the one or more germaniumwaveguide heterojunction phototransistors 111A-111D, 201A, 201B, 301,400 by a feedback network 205A, 205B.

The one or more received optical signals may be coupled into oppositeends of the one or more waveguide heterojunction phototransistors111A-111D, 201A, 201B, 301, 400. A collector region 419 of the one ormore germanium waveguide heterojunction phototransistors 111A-111D,201A, 201B, 301, 400 may comprise a silicon layer 421 and a germaniumlayer 419B, and a base region 417 of the one or more germanium waveguideheterojunction phototransistors 111A-111D, 201A, 201B, 301, 400 maycomprise a silicon germanium alloy with germanium composition rangingfrom 70% to 100%. The germanium waveguide heterojunctionphototransistors 111A-111D, 201A, 201B, 301, 400 may be biased via anelectrical signal 309 applied to a base terminal 411 or via an opticalsignal. The received one or more optical signals may be demodulated bycommunicating a mixer signal 309 to a base terminal 411 of the one ormore germanium waveguide heterojunction phototransistors 111A-111D,201A, 201B, 301, 400.

While the invention has been described with reference to certainembodiments, it will be understood by those skilled in the art thatvarious changes may be made and equivalents may be substituted withoutdeparting from the scope of the present invention. In addition, manymodifications may be made to adapt a particular situation or material tothe teachings of the present invention without departing from its scope.Therefore, it is intended that the present invention not be limited tothe particular embodiments disclosed, but that the present inventionwill include all embodiments falling within the scope of the appendedclaims.

1-22. (canceled)
 23. A method for processing signals, the methodcomprising: in a photonically-enabled CMOS chip fabricated from asilicon-on-insulator substrate: receiving one or more optical signalsvia a top surface of said photonically-enabled CMOS chip; and generatingone or more electrical signals in said photonically-enabled CMOS chiputilizing one or more germanium waveguide heterojunctionphototransistors that detect said one or more optical signals, said oneor more germanium waveguide heterojunction phototransistors comprising abase and a split collector, said split collector comprising asilicon-on-insulator (SOI) layer and a germanium layer, wherein thethickness of the germanium layer is such that carriers in the base donot interact with defects from an interface between the SOI layer andthe germanium layer.
 24. The method according to claim 1, comprisingamplifying said one or more generated electrical signals via one or moretransimpedance amplifiers.
 25. The method according to claim 2,comprising biasing said one or more germanium waveguide heterojunctionphototransistors by a feedback network for said one or moretransimpedance amplifiers.
 26. The method according to claim 1,comprising amplifying said one or more generated electrical signals viaone or more voltage amplifiers.
 27. The method according to claim 1,comprising coupling said one or more received optical signals intoopposite ends of said one or more germanium waveguide heterojunctionphototransistors.
 28. The method according to claim 1, wherein the basecomprises a silicon germanium alloy with germanium composition rangingfrom 70% to 100%.
 29. The method according to claim 1, wherein anemitter of said one or more germanium waveguide heterojunctionphototransistors comprises one or more of: crystalline silicon,crystalline silicon-germanium, poly-silicon, and/orpoly-silicon-germanium.
 30. The method according to claim 1, comprisingbiasing said one or more germanium waveguide heterojunctionphototransistors via an optical signal.
 31. The method according toclaim 1, comprising demodulating said received one or more opticalsignals by communicating a mixer signal to the base.
 32. The methodaccording to claim 1, comprising biasing the base utilizing an electrodethat is formed longitudinally in the direction of light travel throughthe one or more germanium waveguide heterojunction phototransistors. 33.A system for processing signals, the system comprising: aphotonically-enabled CMOS chip fabricated in a silicon-on-insulatorsubstrate, said photonically-enabled CMOS chip being operable to:receive one or more optical signals via a top surface of saidphotonically-enabled CMOS chip; and generate one or more electricalsignals in said photonically-enabled CMOS chip utilizing one or moregermanium waveguide heterojunction phototransistors that detect said oneor more optical signals; wherein said one or more germanium waveguideheterojunction phototransistors comprise a base and a split collector,said split collector comprising a silicon-on-insulator (SOI) layer and agermanium layer, wherein the thickness of the germanium layer is suchthat carriers in the base do not interact with defects from an interfacebetween the silicon SOI layer and the germanium layer.
 34. The systemaccording to claim 33, wherein said photonically-enabled CMOS chip isoperable to amplify said one or more generated electrical signals viaone or more transimpedance amplifiers.
 35. The system according to claim34, wherein said photonically-enabled CMOS chip is operable to bias saidone or more germanium waveguide heterojunction phototransistors by afeedback network for said one or more transimpedance amplifiers.
 36. Thesystem according to claim 33, wherein said photonically-enabled CMOSchip is operable to amplifying said one or more generated electricalsignals via one or more voltage amplifiers.
 37. The system according toclaim 33, wherein said photonically-enabled CMOS chip is operable tocouple said one or more received optical signals into opposite ends ofsaid one or more germanium waveguide heterojunction phototransistors.38. The system according to claim 33, wherein the base comprises asilicon germanium alloy with germanium composition ranging from 70% to100%.
 39. The system according to claim 33, wherein an emitter of saidone or more germanium waveguide heterojunction phototransistorscomprises one or more of: crystalline silicon, crystallinesilicon-germanium, poly-silicon, and/or poly-silicon-germanium.
 40. Thesystem according to claim 33, wherein said photonically-enabled CMOSchip is operable to bias said one or more germanium waveguideheterojunction phototransistors via an optical signal.
 41. The systemaccording to claim 33, wherein said photonically-enabled CMOS chip isoperable to demodulate said received one or more optical signals bycommunicating a mixer signal to the base.
 42. The system according toclaim 33, wherein the germanium waveguide heterojunctionphototransistors comprise a base electrode that is formed longitudinallyin the direction that light travels through the one or more germaniumwaveguide heterojunction phototransistors.
 43. A semiconductor device,the device comprising: a germanium phototransistor on aphotonically-enabled CMOS chip, said germanium phototransistorcomprising: a base; a polycrystalline emitter; and a split collectorcomprising a germanium layer and a silicon-on-insulator (SOI) layer,said split collector being coupled to a collector electrode, saidcoupling utilizing a shallow trench, a collector contact tub, and asalicided collector contact.